当社のフィルタの紹介については、以下をご参照ください。

CMP Filters

Accumate^® E series slurry filters

• NexPore Accumate E series graded density filters are constructed of wrapped Nano Melt Blown (NMB) polypropylene media, have a retention gradient along their depth.
• The filter media was engineered to be with a sharp retention cut-off that closely aligns to the size distribution of undesired particles to be removed.
• This sharp removal cut-off will not alter percent solids or remove desired particles thus preserving the polishing characteristics of the slurry.

• Accumate^® E Series Filters
• PP NMB + PP Hardware
• Micron: 1, 3, 5, 7, 9, 11, 16

CMP Filters

Accumate^® P series slurry filters

• NexPore Accumate P series filters are disposable capsules, combine 2 construction types the depth and the pleated together to significantly increase the filtering area.
• This unique media combination greatly increases the area, so this capsule can also be used with tighter retention ratings, and enables filtration in chemical delivery system applications where a higher particle loading capacity is required.
• The filter media is Nano Melt Blown (NMB) with improved media porosity that addresses the problems associated with flow rate reductions during filtration. 
• The high particle holding capacity resulting from the special designed pleated plus depth media construction and the use of NMB media also extends filter life, reducing the overall cost of ownership in the filtration process.

• Accumate^® P Series Filters
• PP NMB + PP Hardware
• Micron: 0.1, 0.3, 0.5, 0.7, 1. 3, etc.

ECP filters

Aquapure^® filters

• NexPore Aquapure filters use highly-asymmetric PES membrane with ‘philic character. The more elegant approach is to modify the structure of the filter, so there are more places on the surface of the filter for particles to be trapped without blocking the pores. This technique uses an asymmetric membrane structure in which the upstream surface of the filter has larger pores than the downstream surface. 
• Our Aquapure series filters are designed to solve one of the major problems in electrochemical copper deposition: the formation of particles in gel-like nature significantly increases their ability to plug the filters.
• The entire materials of our Aquapure filter construction do not interact with plating chemistry and the hydrophilic character of PES ensures minimizing the microbubble generation and resulting in fastest start up times, the user does not need to pre-wet the filter in advance.

• Aquapure^® Filters
• PES Membrane + HDPE Hardware
• Micron: 20nm, 30nm, 50nm
• 0.1, 0.2, 0.45, 0.65, 0.8, 1.2 µm

WET ETCH/ CLEAN filters

Etchclean^® filters

• NexPore Etchclean filters are applicable for dilute HF and BOE cleaning filtration applications using inherently hydrophilic, highly-asymmetric polyethersulfone (PES) membranes.
• The high asymmetric membrane structure of our Etchclean filter delivers superior flow rates and throughput while providing absolute-particle retention. These filters last longer and retain more contaminants than most filter suppliers.
• Our Etchclean PES membrane is a mechanically strong membrane and is resistive to a broad range of aqueous solvents.
• The Etchclean filter is the filter of choice for DHF and BOE cleaning applications with very low metal ion extractables , as low as 20 ppb in total where the od83mm/10” sample was soaked in 5%, 1500ml HCl for 24 hrs.

• Etchclean^® Filters
• PES Membrane + HDPE Hardware
• Micron: 10nm, 20nm, 30nm, 50nm
• 0.1, 0.2, 0.45, 0.65, 0.8, 1.2 µm

CDS filters (Chemical Delivery System)

Fluorolux^® filters

• Nexpore Fluorolux filter cartridges are made entirely from fluoroplastic that can withstand the harshest process conditions due to the virtually indestructible material. Providing broad chemical compatibility, you can count on these filters to produce consistent, uniform process streams in your most demanding filtration applications.
• The hardware PFA 440HP contains no additives and is designed for hostile chemical environments where purity in the parts-per-billion range is needed. The additional benefits may include enhanced purity, improved thermal stability, and chemical inertness to nearly all industrial chemicals and solvents.
• The unlaminated hydrophilic & hydrophobic PTFE filter media are compatible with strong acids, aggressive solvents and high temperatures. These filters are ideal for applications requiring stringent temperatures or chemicals without adding particulates to the filtrate.
• The Flourolux filter is post-treated, purified to be with extremely low metal ion extractables , as low as < 10 ppb in total where the od83mm/10” sample was soaked in 5%, 1500ml HCl for 72 hrs.

• Fluorolux^® Filters
• PTFE Membrane + PFA Hardware
• Micron: 20nm, 30nm, 50nm
• 0.1, 0.2, 0.45, 1.0, 3.0, 5.0 µm etc.

PHOTO filters (DI water and Developer)

Aquaclear^® filters

• NexPore Etchclean filters are applicable for dilute HF and BOE cleaning filtration applications using inherently hydrophilic, highly-asymmetric polyethersulfone (PES) membranes.
• The high asymmetric membrane structure of our Etchclean filter delivers superior flow rates and throughput while providing absolute-particle retention. These filters last longer and retain more contaminants than most filter suppliers.
• Our Etchclean PES membrane is a mechanically strong membrane and is resistive to a broad range of aqueous solvents.
• The Etchclean filter is the filter of choice for DHF and BOE cleaning applications with very low metal ion extractables , as low as 20 ppb in total where the od83mm/10” sample was soaked in 5%, 1500ml HCl for 24 hrs.

• Aquaclear^® Filters
• PES Membrane + HDPE Hardware
• Micron: 10nm, 20nm, 30nm, 50nm
• 0.1, 0.2, 0.45, 0.65, 0.8, 1.2 µm

Biochemical filters

PESA 0.22µm Biochemical filters

• PESA 0.22 hydrophilic cartridge filters are sterilizing grade cartridge filters manufactured from polyethersulfone membrane and polypropylene components providing high flow rates and throughputs, low extractables, broad chemical compatibility. PESA 0.22 cartridge filters are 100% integrity tested during manufacturing to assure sterilizing-grade performance.
• We provide assistance in validating PESA 0.22 cartridge filters in end user processes including specifications, test methods, and test Results for the PESA 0.22 cartridge filter.
• We guide users by providing an introduction, a product description, a set of catalogue numbers, a description of product specifications, a sample Certificate of Quality, a test summary, and a chemical compatibility chart.
• We also guide users by providing test methods and Results for: organism retention, integrity test, water flow rate and pressure drop, hydraulic stress resistance, thermal stress resistance, USP Biological Safety, and cleanliness.

• Pharmaceutical Grade PESA Filters
• PES Membrane + PP Hardware
• Micron: 0.1, 0.22, 0.45 µm

Biochemical filters

PTFE GPFL-P 0.22µm Biochemical filters

• GPFL-P 0.01/0.22 hydrophobic cartridge filters are sterilizing grade cartridge filters manufactured from PTFE membrane and polypropylene components providing high flow rates and throughputs, low extractables, broad chemical compatibility. GPFL-P 0.01/0.22 cartridge filters are 100% integrity tested during manufacturing to assure sterilizing-grade performance.
• We have built up the correlation between bacterial challenge retention and a non-destructive integrity test which must be proven. The procedure documented is ASTM F838.
• The filters were autoclaved for one cycle of 30 minutes, 121℃ . The quantity of gravimetric extractables was then determined using a 24 hour static soak in purified water at ambient temperature.
• We also guide users by providing test methods and Results for: organism retention, integrity test, water flow rate and pressure drop, hydraulic stress resistance, thermal stress resistance, USP Biological Safety, and cleanliness.

• Pharmaceutical Grade PTFE Filters
• PES Membrane + PP Hardware
• Micron: 0.1, 0.22, 0.45 µm

以下は当社の NexPore™ の一部の濾過膜製品についての簡単な紹介です。

Calendared Polypropylene Nanofilter Membrane

• Nano-calendaring PP media enhances the actual filtering efficiency up to 0.3 micron absolute!
• This type of filter media can prevent its fiber from releasing downstreams and is a none-fiber- migration media.

PTFE membrane with the 3 times faster flow rate

• Reducing the scale and cost of a filtration equipment designing
• With its core character of 3 times faster flow rate than conventional PTFE   membrane, the consumption of filter cartridges can be greatly lowered.

UHMPP (Ultra-high-molecular PP)

• An ultra-high filtering efficiency PP membrane with very uniform pore size distribution and nice chemical compatibility which can replace UPE membrane directly in most cases.
• High liquid & gas flow fluxes are carried out due to the membrane's unique character of being high membrane void volume (porosity).

Highly-asymmetric Polysulfone membrane

• Optimized highly-asymmetric structure (as the SEM of its cross section below) combines several advanced characters: physical strength, high flow velocity and self-prefitering properties.
• It provides the longest service life in electronic industry than any other competitor's similar  products (i.e. PS or PES membrane)

RV-PTFE

• RV-PTFE stands for the Reinforced-vary-PTFE with the rating selection of  0.1 ~ 0.2 micron. The optimum control ability toward tiny particles makes it an ideal selection for stringent filtration demands.
• Hydrophilic RV-PTFE membranes are available.

Nylon66 plus

• Positively-charged Nylonn6,6: effectively filtrate and remove micro gels, micro organisms and most negatively-charged fine particulates.
• Negatively-charged Nylon 6,6 : effectively filtrate and remove general metal ions and  positively-charged particles.

Asymmetric PTFE

• Dual-layer construction, asymmetric PTFE enhances the perfect combination of its filtering efficiency, flow rate and lifetime to serve as the nano particle filtration device.
• Micron rating of membranes: 20nm, 30nm, 50nm.

UPE membrane

• with extremely uniform pore construction providing reliable and consistent filtration results.
• Superior uniform pore construction Moderate to high chemical resistance Instantly wetted by photoresists

Negatively-charged PE membrane

• Mainly designed for metal ion removal purpose and its effectiveness is more advanced than conventional ion-exchange-resin type membranes.
• It is extremely effective to remove overall metal ions from the level 200ppb down to as low as 1ppb when applied in PR filtration.

Optimum Nylon nanofiber

• This filter media will be the most uniform and finest nanofiber in the near future to replace most membranes with its even better overall performances such as higher flow rate and much longer service life. Details will be released to valued customers in the middle of 2017. 

当社は20種を超える濾過膜を提供しており、各種ろ過精度及び50種以上の各形状のフィルタ製品を提供しております。
より詳しい資料をご希望の際は、ぜひ当社までご連絡ください。

以下は特別シリーズの性能に近い当社のフィルタです。
Hereunder are specific items performing close to our filter products, Optimizer \ FlowPlane \ Fluorogard \ Planarcap \ Solaris \ Torrento \ Eximor Planargard \ Guardian \ Intercept \ Fluoroline \ Profile \ StarKleen \ CMP CMPure \ XpressKleen \ Ultipleat \ UltiKleen \ Ulti-Etch SDR \ FlexBowl Mini Kleen-Change... made by Entegris, Mykrolis, Pall, Domnick Hunter, Gore, Parker, 3M, GE Osmonics, Millipore, Sartorius.